DICING PERIPHERALS

LEADING PRODUCTS WITH WORLD-WIDE REPUTATION

  • Improve your process stability and accuracy
  • Lower production cost and save energy
  • Customized solutions for your specific needs
  • Gain a long lasting partnership and commitment

966

WAFER MOUNTER

Designed for manual mounting of workpieces on tapes. Supporting various types of dicing tapes and standard frames. Can be customized for multiple substrates (multi-panel) and irregular frames

FEATURES & BENEFITS

  • Adjustable mechanical design > Uniform tape tension and bubble free – mounting
  • Temperature controlled chuck heater > enhancing adhesion strength
  • Anti static roller Reducing electrical charge
  • Built-in vacuum holder Improving mounting accuracy
  • UV back tape collector Easy removal of UV protective layer

OPTIONS

  • Electro-Static eliminator
  • Plastic frame support
  • Rectangular frame support
  • Custom chucks and tailor made solutions

967

AUTO WAFER MOUNTER

Designed for quality, hands-free mounting of workpieces on tapes. It features fast, consistent, precise and economic mounting at an exceptional cost-performance

FEATURES & BENEFITS

  • Automatic-controlled process hands-free operation, consistent mounting
  • Adjustable roller pressure Bubble-free, uniform mounting
  • Flexible design Supports large variety of dicing tapes and frames
  • Unique mechanical structure
  • Optimized tape usage, 20% Tape saving compare to manual system.
  • Smart UI Tape usage monitoring and visual alerts

OPTIONS

  • Frame vacuum holder
  • Non-Contact mounting kit
  • Auto frame size detector and cutter
  • Vacuum pencil
  • Air puff kit
  • Communication kit
  • Electro-Static eliminator
  • Rectangular frame support
  • Custom chucks

977

WAFER CLEANER

Designed for after-dicing workpiece cleaning and drying. Equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements.

FEATURES & BENEFITS

  • Compact design Small foot print
  • One touch activation, automatic lead cover closing > Quick and easy operation
  • Programmable sequence control > Supports a wide range of applications
  • Robust mechanical and electrical design High reliability
  • Advanced washing/drying arm configuration High cleaning and drying performance

OPTIONS

  • Built-in exhaust blower
  • Ionizer
  • IR heater
  • Surfactant nozzle and tank
  • Water Resistivity measurement
  • CO2 injector
  • Tape-less vacuum holding
  • Special customized solutions
  • Rectangular frame support
  • Custom chucks

927

WATER RECYCLING SYSTEM

Designed for closed-loop, uniform supply of cutting water. It recycles drain water thru filtering, cooling and pumping to maintain required purification, temperature and flow levels for optimized dicing, cost saving and environment care

FEATURES & BENEFITS

  • Water recirculation Reducing consumption by 95%
  • Efficient cooling system Reducing power consumption
  • Self-Cleaning filter saving cost of maintenance
  • Low environment impact

OPTIONS

  • Conductivity sensing kit
  • Surfactant dispenser
  • DI- Water recycling module
  • Ultraviolet purification lamp

937-A

SPINDLE CHILLER

Designed for closed-loop supply of spindle cooling water. It maintains stable, temperature-controlled water; an important factor for achieving high dicing accuracy and quality.

FEATURES & BENEFITS

  • Water circulation Reducing water consumption
  • Water temperature control Minimizing thermal expansion for high dicing accuracy
  • High pumping capacity Supporting up to 3 dicing saws simultaneously
    (low CoO)
  • Touch panel LCD Easy operation
  • Unique pumping technology Quiet operation, compact design and maintenance-free long life

947

CO2 INJECTOR

Designed for decreasing the resistivity of deionized (DI) water to a predefined level. Aimed at preventing particle adhesion and damage caused by static discharge during the dicing process.

FEATURES & BENEFITS

  • PID Controlled resistivity level Maintaining optimum and uniform resistivity for high yield
  • Target and range setting
  • Status and alarm indicators
  • Unique injector technology Reducing CO2 consumption
  • Compact design Saving space
  • Durable solid design High reliability, maintenance free
  • Eco friendly

955

UV CURING SYSTEM

Designed for after dicing UV tape curing to reduce the adhesive strength for ease of workpiece removal.

FEATURES & BENEFITS

  • Table-top design compact, space saving
  • Standard UV bulbs commercially available, inexpensive
  • LCD integrated Control panel Easy operation
  • Simple design No moving parts, maintenance free

OPTIONS

  • Hand Held UV meter
  • Nitrogen kit
  • Frame Shutter
  • Auto timer sound kit