Batch Plasma vsp-88l
Can be possible various cleaning evaluation for substrate and wafer and so on
Description
Can be possible various cleaning evaluation for substrate and wafer and so on
Brand
Vision Semicon
Visionsemicon was founded in 1997 only to produce and develop semiconductor manufacturing device.
We have been approved by many companies around with high performance devices, such as semiconductor Plasma.
Specification
| Application Size | 2 Magazines [Max W95 * H150 * D280] |
|---|---|
| 12″ Wafer | |
| Power Source | RF Generator, 13.56MHz, 300W |
| Vacuum Pump | 617L/Min Dry Pump [Option : Oil Rotary Pump] |
| Gas Flow Controller | 1 Mass Flow Controller for Standard [Option : Additional MFC (O2 or Other Gas)] |
| System Dimension | W720mm * H733mm * D761mm (Except Tower Lamp) [Pump : W330mm * H530mm * D780mm] |
| Internal Chamber Size | W424mm * H274mm * D437mm |
| Weight | Aro 170Kg |
| Utility | 220VAC, 3Phase, 6A, Air : 5kgf/㎠, Ar : 3kgf/㎠, N2 : 4kgf/㎠ |
| PC Based Main Control | Windows XP Embedded & C++ Language & TFT LCD Touch Screen |
Features
Multiple function depends on electrode changing
Simple installation on table
PC based on easy operation
