High Temp. Clean Oven
Enhance the adhesion between wafer and polyimide film
Excellent temperature control with superior temperature homogeneity
Easy PC control program
Easy to drive machine and manage data by its own software
Outstanding structure for isolation and insulation
Sample protection by overheating prevention system
Description
Enhance the adhesion between wafer and polyimide film
Excellent temperature control with superior temperature homogeneity
Easy PC control program
Easy to drive machine and manage data by its own software
Outstanding structure for isolation and insulation
Sample protection by overheating prevention system
Brand
Vision Semicon
Visionsemicon was founded in 1997 only to produce and develop semiconductor manufacturing device.
We have been approved by many companies around with high performance devices, such as semiconductor Plasma.
Specification
| Model | VSHCO-1CH | ||
|---|---|---|---|
| Oxygen Monitoring | O2 Analyzer | Optional | |
| Cooling Type | Water Cooling | 3 – 5 Kg/cm2, below 20℃ | |
| Purge | N2 Gas | 0 – 500 SCFH | |
| Exhaust | Cold Trap | Water Cooling | |
| Material | Internal | Stainless Steel | |
| External | Stainless Steel or Steel Powder Coating | ||
| Heater | 24 KW / Chamber | ||
| Insulation | Ceramic Wool | ||
| Safety Device | Electrical Over Temp. Limit | ||
| Mechanical Over Temp. Limit | |||
| Electric Requirement | 220VAC or 380VAC, 3 Phase, 50/60Hz | ||
| Network | SECS/GEM, LAN network | ||
Features
Temp Range : 10℃ ~ 450℃
Temperature control accuracy ± 0.1℃
Digital Recording and Network application
Temperature control and Multistep cure by control panel
Parameter management by barcode
LAN network and CIM PIM hard disk data storage
IN/OUT Automatic indication on LCD monitor
Reviews
There are no reviews yet.