Plasma Clean System VSP-88H
No delamination for molding
Bondability improvment for W/B, D/B process
Custom design is availble for system integration and special application.
Description
No delamination for molding
Bondability improvment for W/B, D/B process
Custom design is availble for system integration and special application.
Brand
Vision Semicon
Visionsemicon was founded in 1997 only to produce and develop semiconductor manufacturing device.
We have been approved by many companies around with high performance devices, such as semiconductor Plasma.
Specification
| Power source | RF Generator, 13.56MHz, 600W [Option : 1000Watts] |
|---|---|
| Vacuum pump | 1560L/min oil rotary pump with 300ß©/h booster [Option : Dry pump] |
| Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
| System dimension | W1110mm x H1850mm x D1010mm |
| Internal chamber dimension | size W580mm x H530mm x D580mm |
| Weight | 600KG |
| Electrical power | 200 VAC, 3Phase, 30A |
| Loading capacity | 8~16 Magazines depends on material / application |
| PC based main control | Windows XP & C++ Language & TFT LCD touch screen |
Features
Excellent & consistent cleaning performance – Less than 10 degree contact angle
High throughput capability with 4 lane transferring & short cycle time
Simple utility connection design with Vertical UP/DOWN chamber movement
Hands-off single in-line system
Vacuum type plasma with small chamber
Easy operation with touch screen operation & PC based main control
Low price, low operation cost
LAN net working & CIM is available
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